Noise level (the period longer than 20s) | 1nm |
Modes of operation:
1 movement velocity measurement:
- frequency range
- sensitivityч
2 displacement measurement (with feedback):
- frequency range
- sensitivity
|
0,1 - 10 Hz
10-4 m/s
up to 5x10-2 Hz
1 nm |
Dynamic range
- velocity measurement mode
- displacement measurement modeр |
10-9 to 6,4·10-5 m/s
1-0,1 to (6,4-0,64)·10-4 nm |
Interrogation frequency
-velocity measurement mode
- displacement measurement mode |
8 to 1 interrogation/s
8 to 1/8 interrogation/s |